It is well known that the stability of magnetic materials vanishes (i.e., superparamagnetism) with a reduction in size (< 20 nm), a serious materials problem in magnetic sensors and data storage devices. Exchange bias, a magnetic phenomenon occurring from the intimate contact between a ferromagnet (FM) or ferrimagnet (FiM) and antiferromagnet (AFM), is a potential route to develop stable magnetic materials. In this work, we use a novel microplasma deposition technique to synthesize NiFe₂O₄ (FiM) / NiO (AFM) nanogranular films for exchange bias applications. Organometallic precursors are dissociated in a flow-stabilized hollow cathode jet to form nickel iron oxide species (i.e., clusters, nanoparticles, etc.) that are subsequently spray deposited on SiO₂/Si substrates. Specifically, this work will highlight the effects of composition and post-growth annealing on film morphology, structure, and magnetic behavior.